Analysis of crystal structure of epitaxial nanoheterostructures with multiple pseudomorphic quantum wells {InхGa1–хAs/GaAs} on GaAs (100), (110) AND (111) )А substrates

封面

如何引用文章

全文:

开放存取 开放存取
受限制的访问 ##reader.subscriptionAccessGranted##
受限制的访问 订阅存取

详细

The crystal structure of {In0.1Ga0.9As/GaAs} × 10 and {In0.2Ga0.8As/GaAs} × 10 epitaxial multilayer films on GaAs substrates with different orientations has been studied (100), (110), (111)A in order to identify features that may be related to the previously discovered increased efficiency of terahertz radiation generation in films with orientations (110) and (111)A. Significant concentrations of twins and package defects were found in films on non-standard GaAs (110) and (111)A substrates. The composition and thicknesses of individual layers of heterostructures on GaAs (100) substrates have been refined by analyzing thickness fluctuations on diffraction reflection curves.

全文:

受限制的访问

作者简介

Е. Klimov

National Research Centre “Kurchatov Institute”; Orion R&P Association, JSC

编辑信件的主要联系方式.
Email: s_s_e_r_p@mail.ru
俄罗斯联邦, Moscow; Moscow

A. Klochkov

National Research Nuclear University “MEPhI”

Email: s_s_e_r_p@mail.ru
俄罗斯联邦, Moscow

S. Pushkarev

National Research Centre “Kurchatov Institute”

Email: s_s_e_r_p@mail.ru
俄罗斯联邦, Moscow

参考

  1. Naftaly M., Vieweg N., Deninger A. // Sensors. 2019. V. 19. P. 4203. https://doi.org/ 10.3390/s19194203
  2. Consolino L., Bartalini S., De Natale P. // J. Infrared Millim. Terahertz Waves. 2017. V. 38. P. 1289.
  3. Hafez H.A., Chai X., Ibrahim A. et al. // J. Opt. 2016. V. 18. P. 093004. https://doi.org/10.1088/2040-8978/18/9/093004
  4. Dhillon S.S., Vitiello M.S., Linfield E.H. et al. // J. Phys. D. 2017. V. 50. P. 043001. https://doi.org/10.1088/1361-6463/50/4/043001
  5. Krotkus A. // J. Phys. D. 2010. V. 43. P. 273001. https://doi.org/10.1088/0022-3727/43/27/273001
  6. Burford N.M., El-Shenawee M.O. // Opt. Eng. 2017. V. 56. P. 010901. https://doi.org/10.1117/1.OE.56.1.010901
  7. Apostolopoulos V., Barnes M.E. // J. Phys. D. 2014. V. 47. P. 374002. https://doi.org/10.1088/0022-3727/47/37/374002
  8. Castro-Camus E., Alfaro M. // Photon. Res. 2016. V. 4. P. A36. https://doi.org/10.1364/PRJ.4.000A36
  9. Ilg M., Ploog K.H., Trampert A. // Phys. Rev. B. 1994. V. 50. № 23. P. 17111. https://doi.org/10.1103/PhysRevB.50.17111
  10. Климов Е.А., Клочков А.Н., Солянкин П.М. и др. // Квантовая электроника. 2024. Т. 54. № 1. С. 43.
  11. Шик А.Я. Сверхрешетка // Большая российская энциклопедия: научно-образовательный портал. https://bigenc.ru/c/sverkhreshiotka-a2f3e5/?v=5490666
  12. Yerino Christopher D., Liang Baolai, Huffaker Diana L. et al. // J. Vac. Sci. Technol. B. 2017. V. 35. P. 010801. https://doi.org/10.1116/1.4972049
  13. Климов Е.А., Пушкарев С.С., Клочков А.Н. и др. // Микроэлектроника. 2023. Т. 52. № 3. С. 167. https://doi.org/10.31857/S054412692370031X
  14. Климов Е.А., Пушкарев С.С., Клочков А.Н. // Нано- и микросистемная техника. 2022. Т. 24. № 6. С. 283. https://doi.org/10.17587/nmst.24.283-287

补充文件

附件文件
动作
1. JATS XML
下载
2. Fig. 1. Design of superlattice nanoheterostructures. QW – quantum well.

下载 (159KB)
索引源数据
3. Fig. 2. Bright-field TEM images of samples: a – 105 (100), b – 103 (110), 104 (111)A. The insets show the corresponding electron diffraction patterns.

下载 (264KB)
索引源数据
4. Fig. 3. Defects in sample 104 (111)A: a – defect formed in the middle of the film thickness and growing to the surface, bright-field TEM image; b – twinning and stacking defects, high-resolution image.

下载 (706KB)
索引源数据
5. Fig. 4. Bright-field TEM images of dislocations in samples: a – 106 (100), b – 102 (110), c – 102 (111)A.

下载 (494KB)
索引源数据
6. Fig. 5. KDO 004 of samples 105 (a) and 106 (b) on GaAs(100) substrates.

下载 (323KB)
索引源数据
7. Fig. 6. Asymmetrical RDCs of 422 samples 105 (a) and 106 (b) on GaAs(100) substrates at small angles of incidence (1) and small angles of reflection (2).

下载 (245KB)
索引源数据
8. Fig. 7. RDC 111 of samples 102 (1), 104 (2), 107 (3), 108 (4) on GaAs(111)A substrates; for better visualization, RDC are spaced vertically.

下载 (172KB)
索引源数据

版权所有 © Russian Academy of Sciences, 2025