Analysis of crystal structure of epitaxial nanoheterostructures with multiple pseudomorphic quantum wells {InхGa1–хAs/GaAs} on GaAs (100), (110) AND (111) )А substrates

Cover Page

Cite item

Full Text

Open Access Open Access
Restricted Access Access granted
Restricted Access Subscription Access

Abstract

The crystal structure of {In0.1Ga0.9As/GaAs} × 10 and {In0.2Ga0.8As/GaAs} × 10 epitaxial multilayer films on GaAs substrates with different orientations has been studied (100), (110), (111)A in order to identify features that may be related to the previously discovered increased efficiency of terahertz radiation generation in films with orientations (110) and (111)A. Significant concentrations of twins and package defects were found in films on non-standard GaAs (110) and (111)A substrates. The composition and thicknesses of individual layers of heterostructures on GaAs (100) substrates have been refined by analyzing thickness fluctuations on diffraction reflection curves.

Full Text

Restricted Access

About the authors

Е. А. Klimov

National Research Centre “Kurchatov Institute”; Orion R&P Association, JSC

Author for correspondence.
Email: s_s_e_r_p@mail.ru
Russian Federation, Moscow; Moscow

A. N. Klochkov

National Research Nuclear University “MEPhI”

Email: s_s_e_r_p@mail.ru
Russian Federation, Moscow

S. S. Pushkarev

National Research Centre “Kurchatov Institute”

Email: s_s_e_r_p@mail.ru
Russian Federation, Moscow

References

  1. Naftaly M., Vieweg N., Deninger A. // Sensors. 2019. V. 19. P. 4203. https://doi.org/ 10.3390/s19194203
  2. Consolino L., Bartalini S., De Natale P. // J. Infrared Millim. Terahertz Waves. 2017. V. 38. P. 1289.
  3. Hafez H.A., Chai X., Ibrahim A. et al. // J. Opt. 2016. V. 18. P. 093004. https://doi.org/10.1088/2040-8978/18/9/093004
  4. Dhillon S.S., Vitiello M.S., Linfield E.H. et al. // J. Phys. D. 2017. V. 50. P. 043001. https://doi.org/10.1088/1361-6463/50/4/043001
  5. Krotkus A. // J. Phys. D. 2010. V. 43. P. 273001. https://doi.org/10.1088/0022-3727/43/27/273001
  6. Burford N.M., El-Shenawee M.O. // Opt. Eng. 2017. V. 56. P. 010901. https://doi.org/10.1117/1.OE.56.1.010901
  7. Apostolopoulos V., Barnes M.E. // J. Phys. D. 2014. V. 47. P. 374002. https://doi.org/10.1088/0022-3727/47/37/374002
  8. Castro-Camus E., Alfaro M. // Photon. Res. 2016. V. 4. P. A36. https://doi.org/10.1364/PRJ.4.000A36
  9. Ilg M., Ploog K.H., Trampert A. // Phys. Rev. B. 1994. V. 50. № 23. P. 17111. https://doi.org/10.1103/PhysRevB.50.17111
  10. Климов Е.А., Клочков А.Н., Солянкин П.М. и др. // Квантовая электроника. 2024. Т. 54. № 1. С. 43.
  11. Шик А.Я. Сверхрешетка // Большая российская энциклопедия: научно-образовательный портал. https://bigenc.ru/c/sverkhreshiotka-a2f3e5/?v=5490666
  12. Yerino Christopher D., Liang Baolai, Huffaker Diana L. et al. // J. Vac. Sci. Technol. B. 2017. V. 35. P. 010801. https://doi.org/10.1116/1.4972049
  13. Климов Е.А., Пушкарев С.С., Клочков А.Н. и др. // Микроэлектроника. 2023. Т. 52. № 3. С. 167. https://doi.org/10.31857/S054412692370031X
  14. Климов Е.А., Пушкарев С.С., Клочков А.Н. // Нано- и микросистемная техника. 2022. Т. 24. № 6. С. 283. https://doi.org/10.17587/nmst.24.283-287

Supplementary files

Supplementary Files
Action
1. JATS XML
Download
2. Fig. 1. Design of superlattice nanoheterostructures. QW – quantum well.

Download (159KB)
Indexing metadata
3. Fig. 2. Bright-field TEM images of samples: a – 105 (100), b – 103 (110), 104 (111)A. The insets show the corresponding electron diffraction patterns.

Download (264KB)
Indexing metadata
4. Fig. 3. Defects in sample 104 (111)A: a – defect formed in the middle of the film thickness and growing to the surface, bright-field TEM image; b – twinning and stacking defects, high-resolution image.

Download (706KB)
Indexing metadata
5. Fig. 4. Bright-field TEM images of dislocations in samples: a – 106 (100), b – 102 (110), c – 102 (111)A.

Download (494KB)
Indexing metadata
6. Fig. 5. KDO 004 of samples 105 (a) and 106 (b) on GaAs(100) substrates.

Download (323KB)
Indexing metadata
7. Fig. 6. Asymmetrical RDCs of 422 samples 105 (a) and 106 (b) on GaAs(100) substrates at small angles of incidence (1) and small angles of reflection (2).

Download (245KB)
Indexing metadata
8. Fig. 7. RDC 111 of samples 102 (1), 104 (2), 107 (3), 108 (4) on GaAs(111)A substrates; for better visualization, RDC are spaced vertically.

Download (172KB)
Indexing metadata

Copyright (c) 2025 Russian Academy of Sciences