Evaluation of the component composition and thickness of the modified layer of tungsten and tantalum carbides during stationary sputtering by helium ions bombardment
- Authors: Manukhin V.V.1
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Affiliations:
- National Research University “MPEI”
- Issue: No 9 (2024)
- Pages: 101-105
- Section: Articles
- URL: https://rjsvd.com/1028-0960/article/view/664754
- DOI: https://doi.org/10.31857/S1028096024090133
- EDN: https://elibrary.ru/EHOQAG
- ID: 664754
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