Trimethylplatinum(IV) Complexes for MOCVD Applications: A Physicochemical Study

S. I. Dorovskikh; Доровских С. И.; N. V. Kuratieva; Куратьева Н. В.; I. V. Korolkov; Корольков И. В.; T. V. Basova; Басова Т. В.; I. Yu. Ilyin; Ильин И. Ю.

doi:10.31857/S0132344X22600679

Trimethylplatinum(IV) Complexes for MOCVD Applications: A Physicochemical Study

Authors: Dorovskikh S.I.¹, Kuratieva N.V.¹, Korolkov I.V.¹, Basova T.V.¹, Ilyin I.Y.¹
Affiliations:
1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Issue: Vol 49, No 8 (2023)
Pages: 493-503
Section: Articles
URL: https://rjsvd.com/0132-344X/article/view/667491
DOI: https://doi.org/10.31857/S0132344X22600679
EDN: https://elibrary.ru/SAOFHU
ID: 667491

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Abstract

The structure of trimethylplatinum(IV) iodide [(CH3)3PtI]4 (I) (CIF file CCDC no. 22330007) is refined. The structure of the synthesized for the first time trimethylplatinum(IV) complex with tridentate N,N,O-iminoketonate [(CH3)3Pt(C9H17N2O)] (II) is determined by X-ray diffraction (XRD) (CIF file CCDC no. 22330008). The purity of the isolated phases is confirmed by elemental analysis and IR and NMR spectroscopy. The thermal behavior of complex II is studied by thermogravimetry. The energies of ionization and fragmentation of the molecules of complex II leading to the formation of the most stable fragment [(CH3)3Pt]+ are estimated by quantum-chemical calculations. Complex II is tested in the MOCVD processes. The Pt films with the pronounced (111) texture and particle sizes about 100 nm are prepared on Si plates in the presence of oxygen.

Keywords

trimethylplatinum(IV) complexes, XRD, thermogravimetry, DFT, MOCVD

References

Liang L.C., Liao S.M., Zou X.R. // Inorg. Chem. 2021. V. 60. № 20. P. 15118. https://doi.org/10.1021/acs.inorgchem.1c02494
Skabitsky I.V., Romadina E.I., Sakharov S.G. et al. // J. Organomet. Chem. 2019. V. 896. P. 77. https://doi.org/10.1016/j.jorganchem.2019.05.008
Lien C., Sun H., Qin X. et al. // Surf. Sci. 2018. V. 677. P. 161. https://doi.org/10.1016/j.susc.2018.07.002
Thurier C., Doppelt P. // Coord. Chem. Rev. 2008. V. 252. № 1–2. P. 155. https://doi.org/10.1016/j.ccr.2007.04.005
Komiya S., Ezumi S., Komine N. et al. // Organometallics. 2009. V. 28. № 13. P. 3608. https://doi.org/10.1021/om900319a
Pichaandi K.R., Kabalan L., Amini H.et al. // Inorg. Chem. 2017. V. 56. № 4. P. 2145. https://doi.org/10.1021/acs.inorgchem.6b02801
Ghosh B.N., Lentz D., Schlecht S. et al. // New J. Chem. 2015. V. 39. P. 3536. https://doi.org/10.1039/C4NJ02426E
Ghosh B.N., Hausmann H., Schlecht S. et al. // ZAAC. 2013. V. 639. № 12–13. P. 2202. https://doi.org/10.1002/zaac.201300277
Ghosh B.N., Schlecht S., Bauzá A. // New J. Chem. 2017. V. 41. P. 3498. https://doi.org/10.1039/C7NJ00337D
Lindner R., Wagner C., Steinborn D. // J. Am. Chem. Soc. 2009. V. 131. № 25. P. 8861.https://doi.org/10.1021/ja901264t
Lanci M.P., Remy M.S., Lao D.B. et al. // Organometallics. 2011. V. 30. № 14. P. 370. https://doi.org/10.1021/om200508k
Baker L., Cavanagh A.S., Seghete D. et al. // ACS Nano. 2013. V. 7. № 7. P. 6337. https://doi.org/10.1021/nn402385f
Aaltonen T., Rahtu A., Ritala M. // Electrochem. Solid-state Lett. 2003. V. 6. № 9. P. 130. https://doi.org/10.1149/1.1595312
Karakovskaya K.I., Dorovskikh S.I., Vikulova E.S. et al. // Coatings. 2021. V. 11. № 1. P. 78. https://doi.org/10.3390/coatings11010078
Dorovskikh S.I., Zharkova G.I., Turgambaeva A.E. et al. // Appl. Organomet. Chem. 2017. V. 31. № 7. e3654. https://doi.org/10.1002/aoc.3654
Zharkova G.I., Baidina I., Turgambaeva A. et al. // Polyhedron 2012. V. 40. P. 40. https://doi.org/10.1016/j.poly.2012.03.045
Zharkova G.I., Baidina I.A., Igumenov I.K. et al. // Russ. J. Coord. Chem. 2011. V. 37. P. 680. https://doi.org/10.1134/S1070328411080136
Mohlala L.M., Jen T.-C., Olubambi P.A. // Procedia Manuf. 2019. V. 35. P. 1250. https://doi.org/10.1016/j.promfg.2019.06.083
Dorovskikh S.I., Krisyuk V.V., Mirzaeva I.V. et al. // Polyhedron. 2020. V. 182. P. 114475. https://doi.org/10.1016/j.poly.2020.114475
Dorovskikh S.I., Klyamer D.D., Mirzaeva I.V. et al. // J. Fluor. Chem. 2021. V. 249. P. 109843. https://doi.org/10.1016/j.jfluchem.2021.109843
Fulmer G.R., Miller A J.M., Sherden N.H. et al. // J. Organomet. 2010. V. 29. P. 2176. https://doi.org/10.1021/om100106e
Baldwin J.C., Kaska W.C. // Inorg. Chem. 1975. V. 14. № 8. P. 2020. https://doi.org/10.1021/ic50150a063
APEX2 (version 1.08), SAINT (version 7.03), SADABS (version 2.11), SHELXTL (version 6.12). Madison (WI, USA): Bruker AXS Inc., 2004.
Sheldrick G. // Acta Crystallogr. C. 2015. V. 71. P. 3. https://doi.org/10.1107/S2053229614024218
ADF 2022. SCM. Theoretical Chemistry. Amsterdam (The Netherlands): Vrije Universiteit, 2022. http://www.scm.com
Lenthe E. van, Ehlers A., Baerends E.J. // J. Chem. Phys. 1999. V. 110. № 18. P. 8943. https://doi.org/10.1063/1.478813
Pye C.C., Ziegler T. // Theor. Chem. Acc. 1999. V. 101. № 6. P. 396. https://doi.org/10.1007/s002140050457
Kraus W., Nolze G. // J. Appl. Crystallogr. 1996. V. 9. P. 301. https://doi.org/10.1107/S0021889895014920
Donnay G., Coleman L.B., Krueghoff N.G. et al. // Acta Crystallogr. B. 1968. V. 24. P. 157.
Zharkova G.I., Baidina I.A., Naumov D.Y. et al. // J. Struct. Chem. 2011. V. 52. № 4. P. 550. https://doi.org/10.1134/S0022476611030152
Paul H. // Adv. Eng. Mater. 2010. V. 12. P. 1029. https://doi.org/10.1002/adem.201000078
Goswami J., Wang C.-G., Cao W., Dey S.K. // Chem. Vap. Depos. 2003. V. 9. № 4. P. 213. https://doi.org/10.1002/cvde.20030624033