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Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer
- Authors: Luzanov V.A.1
-
Affiliations:
- Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
- Issue: Vol 68, No 5 (2023)
- Pages: 470-471
- Section: НАНОЭЛЕКТРОНИКА
- URL: https://rjsvd.com/0033-8494/article/view/650531
- DOI: https://doi.org/10.31857/S0033849423050108
- EDN: https://elibrary.ru/UHVBOK
- ID: 650531
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Abstract
To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimizethe mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.
About the authors
V. A. Luzanov
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
Author for correspondence.
Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia
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