Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer

V. A. Luzanov; Лузанов В. А.

doi:10.31857/S0033849423050108

Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer

Authors: Luzanov V.A.¹
Affiliations:
1. Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
Issue: Vol 68, No 5 (2023)
Pages: 470-471
Section: НАНОЭЛЕКТРОНИКА
URL: https://rjsvd.com/0033-8494/article/view/650531
DOI: https://doi.org/10.31857/S0033849423050108
EDN: https://elibrary.ru/UHVBOK
ID: 650531

Cite item

Full Text

Open Access
Restricted Access

Access granted
Restricted Access

Subscription or Fee Access

Abstract

To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimizethe mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.

Keywords

piezoelectric transducer, zinc oxide, epitaxial single-crystal film

About the authors

V. A. Luzanov

Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch

Author for correspondence.
Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia

References

Лузанов В.А., Алексеев С.Г., Ползикова Н.И. // РЭ. 2018. Т. 63. № 9. С. 1015.
Morales C., Leinen D., del Campo A. et al. // J. Alloys and Compounds. 2021. V. 884. Article No. 161056.
Franklin J.B., Zou B., Petrov P. et al. // J. Material Chemistry. 2021. V. 21. № 22. P. 8178.
Steiger P., Zhang J., Harrabi K. et al. // Thin Solid Films. 2018. V. 645. P. 417.