Flow of high-energy positive oxygen ions from plasma onto the substrate in a pulsed magnetron discharge with a hot target.

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Abstract

A group of high-energy positive O^+ ions was detected in a plasma flow
high-current pulsed magnetron discharge with a hot target in an Ar/O_2 gas mixture. The mechanism for the formation of accelerated O^+ ions may be the conversion of accelerated ones in the cathode layer of negative ions O^– → O^+ in the processes of charge exchange or ionization by electron impact.

About the authors

D. V. Kolodko

Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch; National Research Nuclear University Moscow Engineering Physics Institute; P.N. Lebedev Physical Institute Russian Academy of Sciences

Email: dobrynya_kol@mail.ru
Fryazino, Moscow oblast, 141190 Russia; Moscow, 115409 Russia; Moscow, 119991, Russia

A. V. Kaziev

National Research Nuclear University Moscow Engineering Physics Institute

Email: dobrynya_kol@mail.ru
Moscow, 115409 Russia

D. G. Ageichenkov

National Research Nuclear University Moscow Engineering Physics Institute

Email: dobrynya_kol@mail.ru
Moscow, 115409 Russia

V. Yu. Lisenkov

National Research Nuclear University Moscow Engineering Physics Institute

Author for correspondence.
Email: dobrynya_kol@mail.ru
Moscow, 115409 Russia

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Copyright (c) 2023 Д.В. Колодко, А.В. Казиев, Д.Г. Агейченков, В.Ю. Лисенков