Precision Position Sensor for Operational Control of Laser Synthesis of Microstructures on Three-Dimensional Surfaces of Optical Materials

M. A. Zavyalova; Завьялова М. А.; A. V. Soldatenko; Солдатенко А. В.; S. A. Kokarev; Кокарев С. А.

doi:10.31857/S003281622302012X

Precision Position Sensor for Operational Control of Laser Synthesis of Microstructures on Three-Dimensional Surfaces of Optical Materials

Authors: Zavyalova M.A.¹, Soldatenko A.V.¹, Kokarev S.A.¹
Affiliations:
1. Design and Technology Institute of Scientific Instrumentation, Siberian Branch, Russian Academy of Sciences
Issue: No 3 (2023)
Pages: 80-90
Section: ОБЩАЯ ЭКСПЕРИМЕНТАЛЬНАЯ ТЕХНИКА
URL: https://rjsvd.com/0032-8162/article/view/670518
DOI: https://doi.org/10.31857/S003281622302012X
EDN: https://elibrary.ru/UXQXIW
ID: 670518

Cite item

Full Text

Open Access
Restricted Access

Access granted
Restricted Access

Subscription Access

Abstract
About the authors
References
Supplementary files
Statistics

Abstract

The results of computer simulation of a precision position sensor based on the Foucault knife for automatic focusing of radiation during high-speed laser technological processes are presented, and the results of its implementation and testing at industrial enterprises as part of circular laser recording systems are presented. This sensor is built into laser complexes for microstructuring the surface of optical materials and makes it possible to determine their position with high resolution (the error does not exceed 0.1 µm).

References

Skidanov R.V., Ganchevskaya S.V., Vasil’ev V.S., Blank V.A. // J. Opt. Technol. 2022. № 89. P. 132–136. https://doi.org/10.1364/JOT.89.000132
Gerhard C. Optics Manufacturing: Components and Systems. CRC Press. 2017. P. 325. ISBN: 9781351228367. https://doi.org/10.1201/9781351228367
Полещук А.Г., Корольков В.П., Вейко В.П., Заколдаев Р.А., Сергеев М.М. // Автометрия. 2018. № 2. С. 3. https://doi.org/10.15372/AUT20180201
Завьялова М.А. Дис. … канд. техн. наук, Новосибирск: Новосиб. гос. техн. ун-т, 2021.
Radtke D., Zeitner Uwe D. // Optics Express. 2007. V. 15. № 3. P. 1167. https://doi.org/10.1364/OE.15.001167
Taisheng Wang, Weixing Yu, Dengying Zhang, Chunrong Li, Hongxin Zhang, Wenbin Xu, Zhijun Xu, Hua Liu, Qiang Sun, Zhenwu Lu // Optics Express. 2010. V. 18. № 24. P. 25102. https://doi.org/10.1364/OE.18.025102
Luo J., Liang Y., Yang G. // Optical Engineering. 2011. V. 50 (7). P. 073601. https://doi.org/10.1117/1.3597327
Верхогляд А.Г., Завьялова М.А., Качкин А.Е., Кокарев С.А., Корольков В.П. // Датчики и системы. 2015. № 9–10. С. 45.
Handbook of Optics. MacGraw-Hill Companies. Inc. 1995. V. I. P. 31.14.
Chugui Yu.V., Verkhoglyad A.G., Zavyalov P.S., Sysoev E., Kulikov R.V., Vykhristyuk I.A., Zavyalova M.A., Poleshchuk A.G., Korolkov V.P. // Int. J. of Automation Technology. 2015. V. 9. № 5. P. 515.